YieldPro™ is an advanced CD measurement application with innovative approaches in preprocessing, measurement and Neural Network modeling to ensure superior precision and sensitivity.
YieldPro™ by etrology® is a standalone measurement tool for CD, Overlay, and PSD measurements of images from any manufacturer. With an unlimited number of layers and the ability to add an unlimited number of measurements, we can handle classical measurements and advanced, specific measurements needed for process development.
Multilayer, multipattern, and multi-measurement capabilities
Optimized, separate processing of SE and BSE signals for more precise and accurate results
Incorporates neural network filtering for improved noise suppression and close to one-frame measurement
Flexible GUI and intuitive interface with reduced tunable parameters
Simplified development SW allows for easy introduction of new algorithms without recompilation
Easy to configure for different image input formats
Pre-tuned for SE and BSE signals in measurement algorithms
Local definition of measurement window for less impact from 2D and process variation
No topo point fitting, profile treatment used instead (Gaussian, Wavelets)
High roughness measurement capability (for Logic)
Flexible GUI for measuring via contacts in regions and high elongation contacts
Capable of overlay measurement from one or more layers (BSE/SE or Crosstalk only).
Non-local mean (NLM), 1D Profile denoiser, and 2D Blind denoiser using AI
Tuned for massive measurements (Large Grab)